Substrate rotating mechanism, for a ceramic or metal deposition chamber, comprises bearing balls in grooves provided in two concentric annular disks and an interposed annular substrate holder

摘要

A substrate rotating mechanism comprises bearing balls running in grooves provided in two spaced-apart concentric annular disks and an interposed annular substrate holder. Substrate rotating mechanism, for a coating chamber, comprises: (a) two identical spaced-apart concentric annular disks with facing annular V-grooves; (b) an annular substrate holder having similar annular V-grooves in its two side faces and a toothed rim at its edge face; (c) low thermal conductivity balls which roll in the annular grooves and which contact each groove at no more than two points; (d) a bearing support provided on the annular disks for receiving the end of a drive shaft on which a drive screw is seated, the drive screw being is held in position by a spacer sleeve in the region of the bearing support such that it engages with the toothed rim; and (e) a holder arm attached to the annular disks for moving the mechanism perpendicularly to the rotational axis of the substrate holder.