摘要 |
<p>A method which comprises contacting a fluorine-containing compound such as C2F6, CF4, CHF3, SF6, NF3 or the like with a catalyst for the decomposition of a fluorine-containing compound together with a catalyst for the decomposition of at least one of CO, SO2F2 and N2O in the presence of water and optionally oxygen. A catalyst for the decomposition of at least one of CO, SO2F2 and N2O preferably comprises at least one of Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of metal or oxide. By the treatment according to the method, a fluorine atom in a fluorine-containing compound can be converted to HF, which is easily absorbed by water or an aqueous alkaline solution, and substances formed by the decomposition of a fluorine-containing compound, such as CO, SO2F2 and N2O, can also be decomposed.</p> |