Plasma generator for plasma coating or machining of large surfaces has all cathodes coupled to voltage source via central current feed line

摘要

The plasma generator has a number of cathodes (1) and corresponding anodes (2) provided by jets (3), all of the cathodes coupled in parallel to a voltage source via a central current feed line (4), provided by Cu elements (5) with a rectangular cross-section. The cathodes and anodes are spaced equi-distantly in a row, or in a 2-dimensional raster.