| 摘要 |
<p>A film-forming apparatus in which the surface roughnesses of members in a vessel are increased so as to improve the corrosion resistance and to prolong the life. A work (W) is mounted on a susceptor (26) installed in an evacuated vessel (22), a film-forming gas is introduced into the vessel, and a film is formed. The surface roughnesses of parts (26, 58, 66) provided in the vessel are larger than those when used ordinarily. By increasing the surface roughnesses of parts in the vessel in such a way, the corrosion resistance is improved and the life is prolonged.</p> |
