GATE VALVE FOR SEMICONDUCTOR PROCESSING SYSTEM

摘要

A gate valve (20) for semiconductor processing system includes a base frame (28) movable along a guide (26) toward and away from a valve seat (22) surrounding an opening (14). Disposed on the upper end of the guide (26) is a first stopper (56) that defines the limit of travel of the base frame (28) on the side of the valve seat (22). The base frame (28) has a swing frame (34) swingably attached thereto, with a valve seat (24) attached to the upper end thereof. The base frame (28) and swing frame (34) are interconnected by a link mechanism (36) capable of bending and stretching by being bent in the intermediate portion thereof, and by spring/damper member (46). The reciprocating rod (54) of an air actuator (52) is connected to an intermediary member (38) in the intermediate portion of the link mechanism (36).