Production of structures in conducting materials comprises producing a pattern of longitudinal macropores in a base body, leaving areas of the base body with the structure of the required structure pore-free, and etching

摘要

Production of structures with relatively small wall thickness and high wall height made from conducting material comprises producing a pattern of longitudinal macropores (12) in a base body (10) with a longitudinal extension in the height of each structure, leaving areas (30, 32, 34) of the base body with the structure of the required structure pore-free, and subsequently removing the porous material by etching to obtain the required structure. Preferred Features: The structure is n-type Si. The length of the longitudinal macropores is selected so that the structure has a wall height whose height extension is more than ten times the wall thickness.