| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe scanning apparatus not generating the approach error caused by the insufficiency of the moving distance of retract coarse motion even if approach coarse motion and contract coarse motion are repeated any times. SOLUTION: The heating temp. of a viscoelastic body 17 by a heating coil 16 at the time of retract coarse motion separating a probe 10 from the surface of a sample is made higher than that at a time of approach coarse motion allowing the probe 10 to approach the surface of the sample. A speed at a time of retract coarse motion is made faster than that at a time of approach coarse motion. The upper end 13a of the inner cylinder 13 supported through the viscoelastic body 17 is allowed to impinge against a stopper 1b at a time of retract coarse motion to restrict the upper dead point of the inner cylinder 13.
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