| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify electrode structure for external wiring by providing an electrode film and a non-terminal part at the electrode formation layer between the laminated piezoelectric films of a multilayer piezoelectric actuator. SOLUTION: A multilayer piezoelectric actuator is provided with only the terminal part of the electrode film of odd-numbered layers on one side surface, and only the terminal of the electrode film of even-numbered layers on the other side surface. Electrodes and non-terminal parts 6, 16, 26, and 36 are provided between piezoelectric films 8. The electrode does not conduct electricity even if the non-terminal parts 6, 16, 26, and 36 are in contact with the electrode for external wiring. Therefore, even if the electrode for external wiring is formed at the non-terminal parts 6, 16, 26, and 36 of the electrode formation layer, electrode films 4, 14, 24, and 34 on the layer do not conduct electricity. By forming the non-terminal parts 6, 16, 26, and 36, the degree of freedom for designing the electrode and wiring for external wiring can be improved, and simplified wiring structure can be obtained efficiently.</p> |
