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发明名称
Position detecting method and apparatus
摘要
申请公布号
EP0358514(B1)
申请公布日期
2000.12.13
申请号
EP19890309097
申请日期
1989.09.07
申请人
CANON KABUSHIKI KAISHA
发明人
SAITOH, KENJI;MATSUGU, MASAKAZU;ABE, NAOTO
分类号
G03F9/00;(IPC1-7):G03F9/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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