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发明名称
SCATTEROMETER
摘要
申请公布号
EP1058834(A1)
申请公布日期
2000.12.13
申请号
EP19990965519
申请日期
1999.12.16
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
WADMAN, SIPKE
分类号
G01B11/30;G01N21/27;G01N21/47;G01N21/84;(IPC1-7):G01N21/47
主分类号
G01B11/30
代理机构
代理人
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