发明名称 |
Manufacturing process and structure of ink jet printhead |
摘要 |
A manufacturing process and a structure for an ink jet printhead with high quality, yield rate, and performance are provided. The process includes steps of: a) providing a substrate, b) forming a dielectric layer over the substrate, c) forming a resistor over the dielectric layer, d) forming a conducting layer over a portion of the resistor, e) forming a passivation over a portion of the conducting layer and another portion of the resistor not covered by the conducting layer, f) forming a hole over the passivation for storing an ink, and g) forming a nozzle over the hole for ejecting therethrough the ink.
|
申请公布号 |
US6159387(A) |
申请公布日期 |
2000.12.12 |
申请号 |
US19970972528 |
申请日期 |
1997.11.18 |
申请人 |
MICROJET TECHNOLOGY CO., INC. |
发明人 |
MOU, TSE-CHI;CHANG, YEE-SHYI;YANG, ARNOLD CHANG-MOU;CHOU, CHIN-YI;TSENG, KOU-YOW;CHANG, YING-LUN;CHENG, SHIANG-CHING;TSAI, HUNG-CHUN |
分类号 |
B41J2/14;B41J2/16;(IPC1-7):B41J2/05;G01D15/18 |
主分类号 |
B41J2/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|