发明名称 Superconducting device and a method of manufacturing the same
摘要 This invention provides a superconducting device with good characteristics that can be reproduced at an arbitrary place on a substrate and a method of manufacturing the same. A convex region (a processed, linearly shaped platinum thin film) of oriented metal is provided on a substrate as a gate electrode. Then, an oxide insulating film (SrTiO3 thin film) is deposited on the convex region, and further a YBa2Cu3O7 oxide superconducting thin film is deposited on the oxide insulating film. Accordingly, a grain boundary part is formed on the convex region. A drain electrode and a source electrode are formed facing each other with the grain boundary part between.
申请公布号 US6160266(A) 申请公布日期 2000.12.12
申请号 US19970803940 申请日期 1997.02.20
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 ODAGAWA, AKIHIRO;ADACHI, HIDEAKI;SETSUNE, KENTARO
分类号 H01L39/22;(IPC1-7):H01L29/06 主分类号 H01L39/22
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