| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently remove perfluorocarbon by mixing gas to be treated, which is washed with water, with lower saturated hydrocarbon gas to heat the gaseous mixture in such a state that there is no free oxygen gas to decompose perfluorocarbon and removing a generated fluorine compd. by washing and burning the gas in the presence of air to remove a combustible component. SOLUTION: When perfluorocarbon(PFC) generated as a byproduct during the production of an electronic circuit element is removed, PFC-containing gas to be treated is guided to a front water scrubber 1 through an inlet pipe 5 to be washed with water and the washed gas to be treated is passed through a water tank 10 to be sent to a gas decomposing tower 2 into which lower saturated or unsaturated hydrocarbon is introduced through an inlet pipe 6. This gas to be treated is heated in the gas decomposing tower 2 to generate corrosive F2 and/or HF and the treated gas is passed through a rear water scrubber 3 to dissolve the F-component in water and the gas free from the F-component is sent to a treated gas combustion tower 4 to be mixed with the open air sent from an air inlet pipe 9 to burn a combustible component.</p> |
