| 摘要 |
PROBLEM TO BE SOLVED: To uniformly and efficiently from a lubricant coating film covering the surface of a hard disk. SOLUTION: In this coating film formation method, under reduced pressure, an evaporation area of a fluidized evaporating material dropping onto an evaporation disk 4 is increased by heating the evaporation disk 4, or the evaporation area of the fluidized evaporating material dropping onto the evaporation disk 4 is increased into a circular form by turning the evaporation disk while being heated, and by further heating the evaporation disk 4 to evaporate the fluidized evaporating material, a coating film is formed as the fluidized evaporating material is condensed on a disk-type substrate 5 located above the evaporation disk 4. A coating film formation device 15 is constituted by opposing an evaporation disk equipped with a heating means 6, or an evaporation disk equipped with a heating means and placed on a supporting body equipped with a rotating means, to a substrate supporting body 10 mounted on a rotating means, and locating the end of a supplying pipe 4 of the fluidized evaporating material equipped with a flow rate controlling means 3 and a heating means, between the evaporation disk and the supporting body of the substrate.
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