| 摘要 |
PROBLEM TO BE SOLVED: To provide a moving stage that can move tables on which objects are placed in a preset direction by an accurate distance in prescribed proportion to the travel that operators give to operating members. SOLUTION: A Z-axis slider coupling plate 24 carrying a table 30 is secured to two Z-axis sliders 23 guided via a linear guide only in a Z direction in relation to a base 21. The table 30 is thus movable only in the Z direction. A pair of rollers 25 is disposed under the center of the Z-axis slider coupling plate 24. In the bottom of the base 21, a slider 22 sloping in a Y direction to urge the rollers 25 up is slidable only in the Y direction. The slider 22 moves linearly in the Y direction in direct proportion to the rotational amount of a micrometer head 27.
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