发明名称 LEAF TYPE WASHER
摘要 PROBLEM TO BE SOLVED: To perform sorted recover in a leaf type spin washing machine almost without mixing of plural washing liquids successively used and also without being diluted. SOLUTION: This device has a holding means 4 for rotatably holding material to be washed, a nozzle 5 for feeding washing liquid to the rotating material to be washed, and a washing liquid recovery vessel 9 abutted on the rotating material to be washed to receive the washing liquid discharged to the periphery. In this case, the recovery vessel 9 is provided with plural recovery chambers 10-13 for receiving the discharged washing liquid in up and down directions, and the recovery vessel 9 and the holding means 4 are installed so as to be relatively movable up and down.
申请公布号 JP2000343046(A) 申请公布日期 2000.12.12
申请号 JP19990155323 申请日期 1999.06.02
申请人 KURITA WATER IND LTD 发明人 MORITA HIROSHI
分类号 B08B3/02;H01L21/304;(IPC1-7):B08B3/02 主分类号 B08B3/02
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