CHEMICAL-RESISTANT PRECISE FILTER CARTRIDGE POSSIBLE TO BE INCINERATED

摘要

PROBLEM TO BE SOLVED: To provide a filter cartridge withstanding the high temp. filtering of a mixed soln. of hydrochloric acid and hydrogen peroxide affreviated to 'chloride-peroxide mixture' or isopropanel frequently used in a semiconductor producing process at 60-80 deg.C and easy in the incineration treatment of a used filter. SOLUTION: A microprous filter membrane 3 constituting a filter cartridge comprises aromatic polyaryl ether sulfone and all of filter cartridge constituting members excepting a detachable O-ring or gasket constituting the filter cartridge comprise a non-halogen substance. Precise filtering for filtering a mixed soln. of hydrochloric acid and hydrogen peroxide or isopropanol at 60-80 deg.C can be performed.