发明名称 Method and apparatus for providing rectangular shaped array of light beams
摘要 A linear array of equal intensity optical beams is transformed into a rectangular array of equal intensity optical beams, while the intensity of each beam is kept nearly constant. The transformation is performed using an optical element which has two coatings on the front surface and a reflective coating on the opposing back surface. The front surface is partially coated with a reflective coating and partially coated with an anti-reflective coating. The beams are incident upon the front surface, with some of the beams incident on each of the two different coatings on the front surface. The beams incident on the front surface are specularly reflected. The remaining beams are transmitted through the optical element to the back surface, reflected from the back surface, and transmitted back up through the optical element and exit from the front surface. The exiting beams are thus shifted laterally and transversely to define the desired rectangular array. The index of refraction, thickness of the optical element and the incident angle of the beam as are selected to achieve the desired arrangement of beams.
申请公布号 AU5279400(A) 申请公布日期 2000.12.12
申请号 AU20000052794 申请日期 2000.05.19
申请人 ETEC SYSTEMS, INC. 发明人 SAMUEL C. HOWELLS
分类号 G02B5/08;G02B27/09;G02B27/14;G03F7/20;H01L21/027 主分类号 G02B5/08
代理机构 代理人
主权项
地址