发明名称 UNIAXIAL ACTUATOR
摘要 PROBLEM TO BE SOLVED: To provide a uniaxial actuator having no risk of generating a magnetic field. SOLUTION: In a uniaxial actuator wherein a stationary side base 10 and a movable side top plate 11 are connected together by means of bellows 12 which can be expanded by working fluid fed through an introduction port 10a formed in the base 10 while the restoring force for the bellows 12 can be obtained by a compression coil spring 13, the actuator comprises components which are made of nonmagnetic materials.
申请公布号 JP2000346009(A) 申请公布日期 2000.12.12
申请号 JP19990156013 申请日期 1999.06.03
申请人 SUMITOMO HEAVY IND LTD 发明人 KATO TATSURO
分类号 H01L41/09;F15B15/10;G03F7/20;H01L21/027;(IPC1-7):F15B15/10 主分类号 H01L41/09
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