发明名称 |
Cell control method and apparatus |
摘要 |
An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication cluster tool. Cell controller software integrates an adaptive run-to-run controller, process tool recipe upload and download through a SECS port, sensor control, data archiving, and a graphical user interface.
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申请公布号 |
US6161054(A) |
申请公布日期 |
2000.12.12 |
申请号 |
US19980156277 |
申请日期 |
1998.09.17 |
申请人 |
ON-LINE TECHNOLOGIES, INC. |
发明人 |
ROSENTHAL, PETER A.;SOLOMON, PETER R.;BONANNO, ANTHONY S.;EIKLEBERRY, WILLIAM J. |
分类号 |
C23C14/54;C23C16/52;H01L21/00;(IPC1-7):G06F19/00 |
主分类号 |
C23C14/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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