| 摘要 |
PROBLEM TO BE SOLVED: To obtain a double alkoxide of niobium or tantalum, and an alkaline earth metal, less prone to cause thermal dissociation, liquid at ordinary temperature and having distillable properties, and further to provide a method for producing the double alkoxide and a method for producing a complex oxide dielectric substrate by using the same. SOLUTION: This compound of the formula M[N(OCH2H5)5(OC2H4OCH3)]2 (M is Sr or Ba; N is Nb or Ta) is liquid at room temperature and hardly thermally dissociated, and has about 0.2 Torr vapor pressure at 190 deg.C. The compound can be produced by reacting 2 mol N(OC2H5)5 with 1-1.1 mol M(OC2H4 OCH3)2, and collecting the product by distillation. A SrBi2Ta2O9 thin film and a (Sr0.75Ba0.25)Nb2O6 thin film for a semiconductor device can be produced by using the compound as a raw material for a CVD method.
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