| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the cohesion of abrasive material by providing a slurry container for filling slurry, a buffer supply tank, at least two pulse-type acoustic oscillators and a pulse controller. SOLUTION: This slurry feeder constituted to prevent cohesion and coagulation of slurry is provided with at least two pulse-type acoustic oscillators 212a, 212b and a pulse controller 214. The acoustic oscillators 212a, 212b are connected to the pulse controller 214, and the oscillation frequency and oscillation time of the acoustic oscillators 212a, 212b are controlled by the pulse controller 214. The acoustic oscillator (first acoustic oscillator) 212a is disposed at a slurry container 200. The slurry container 200 supplies slurry required for chemical polishing, and there is the possibility of internal abrasive material coagulating due to being left for a long time or some other cause, so that the acoustic oscillator 212a vibrates and grinds the abrasive material by pulse oscillation.</p> |
