发明名称 GRINDING DEVICE FOR WORKPIECE
摘要 <p>PROBLEM TO BE SOLVED: To grind a workpiece face to conventional quality without using slurry containing diamond abrasive grain as an abrasive powder by grinding it using a rubber wheel containing abrasive powder so as to reduce a manufacturing cost and running cost of a device greatly. SOLUTION: This grinding device is provided with a workpiece mounting base 2 fixing a workpiece 4 and a spindle 3 which rotates a rubber wheel 5 containing abrasive powder in the orthogonal direction to a face 4a of the thin platelike workpiece 4 and can advance straight and reciprocate at least in the direction of face of the workpiece 4. The rubber wheel 5 is fed in the direction of face while bringing an outer peripheral face 5a of rotating rubber wheel 5 into contact with the face 4a of the workpiece 4 for grinding.</p>
申请公布号 JP2000343419(A) 申请公布日期 2000.12.12
申请号 JP19990151912 申请日期 1999.05.31
申请人 M TEC KK 发明人 OZAKI HARUO
分类号 B24B29/00;B24B37/02;H01L21/304;(IPC1-7):B24B37/02 主分类号 B24B29/00
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