发明名称 X-ray exposure apparatus with synchrotron radiation intensity measurement
摘要 A synchrotron radiation measuring system includes an X-ray detector movable in a direction of intensity distribution of synchrotron radiation to follow shift of the synchrotron radiation, and a computing device for reserving therein one of (i) a relation between a signal of the X-ray detector and the intensity of synchrotron radiation and (ii) a relation among a signal of the X-ray detector, the level of vacuum at a synchrotron ring and the intensity of synchrotron radiation, wherein the intensity of synchrotron radiation is measured through the computing device on the basis of an output signal of the X-ray detector.
申请公布号 US6160865(A) 申请公布日期 2000.12.12
申请号 US19980057506 申请日期 1998.04.09
申请人 CANON KABUSHIKI KAISHA 发明人 OGUSHI, NOBUAKI
分类号 G21K5/02;G01T1/29;G03F7/20;H01L21/027;H05G1/26;H05H13/04;(IPC1-7):G21K5/00 主分类号 G21K5/02
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