| 摘要 |
PROBLEM TO BE SOLVED: To reduce the deformation of a disk substrate caused by a film formation by sputtering, and to perform stable transferring of the substrate. SOLUTION: When the film is formed on the disk substrate 13, a surface of a movable part 22 of a substrate holder 10 is brought into contact with the rear surface of the disk substrate 13, the whole surface of an information recording area of the disk substrate 13 is stuck and held firmly with a contacting surface of a fixed part 21 and that of the movable part 22. When the disk substrate 13 is attached or detached, the contacting surface of the movable part 22 is moved along a fitting hole 24 of the fixed part 21, and removed from the rear surface of the substrate 13.
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