,申请号JP19970222433-传众专利搜索

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发明名称
摘要
申请公布号	JP3117004(B2)	申请公布日期	2000.12.11
申请号	JP19970222433	申请日期	1997.08.19
申请人		发明人
分类号	G21K5/04;G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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