| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface state analyzing device which can detect the light irregularly reflected or scattered on a sample surface with a simple configuration and can analyze the surface state based on such returning light as irregular reflection and scattering, etc. SOLUTION: By opening a hole on a CCD 4 and irradiating a sample 6 with light through the hole, the CCD 4 can be set near the sample 6. Thus, the returning light which is scattered or irregularly reflected on the surface of the sample 6 is detected with a device of a simple configuration. Since the returning light is made directly incident on a CCD sensitized surface, the intensity of returning light as well as distribution of it are provided.
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