MANUFACTURE OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent generation of breakdown voltage faults, even when an epitaxial film is embedded within a groove. SOLUTION: An epitaxial film 107 is embedded in a groove made in the surface of a semiconductor main body and then subjected to oxidation treatment to remove oxide films on the surface of the epitaxial film and on the surface of the semiconductor main body. The surface of the embedded epitaxial film may be removed together with the surface of the semiconductor main body by a chemical and mechanical polishing method. A part of the embedded epitaxial film may be removed to form a trench gate in the film corresponding to the removed part.