发明名称 DEVICE AND METHOD FOR PRETREATING SAMPLE FOR OBSERVATION THROUGH SCANNING ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To obtain a pretreating device and method with a processing function for preventing a partially or wholly non-conductive sample from being charged up and contaminated at the time of applying a conductive paste on the surfaces of the sample and obtaining satisfactory images through an electron microscope. SOLUTION: This pretreating device is provided with a means 4 to provide a minute amount of droplet 3 containing a conductive substance for any location on a sample 2, an optical microscope for observing and specifying the provided location, a moving means for displacing the relative locations of the sample 2, the droplet providing means 4 and the optical microscope. In this method for pretreating a sample, by providing the droplet 3 of a dispersing liquid containing conductive particulates for any location on the sample 2 through the use of the droplet providing means 4 and then evaporating a solvent, a conductive thin membrane formed of particulates is formed in any shape.
申请公布号 JP2000338017(A) 申请公布日期 2000.12.08
申请号 JP19990148536 申请日期 1999.05.27
申请人 CANON INC 发明人 MIURA NAOKO;NOMA TAKASHI
分类号 G01N1/28;(IPC1-7):G01N1/28 主分类号 G01N1/28
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