| 摘要 |
PROBLEM TO BE SOLVED: To improve a detection sensitivity by making an arrangement so that an upper electrode moves consequent upon the change in curvature caused by the temperature change of sensing part that is formed of a double-layer film with different expansion coefficients, whose one end is fixed, in opposition to the lower electrode with a specific interval. SOLUTION: Lower electrodes 7 and 11, an insulation film 9 for protecting them, and a post 5 are provided on a substrate 10. One end of an insulator 4 made of SiO is fixed to the post 5. An upper electrode 2 made of Al is arranged in opposition to the lower electrodes 7 and 11, and a double-layer film is formed of the insulator 4 and a bimetal structural part AO. Since Al and SiO have different coefficients of expansion, the double-layer film has a different curvature depending on temperature. The post 5 and BO part of the insulator 4 support the upper electrode 2 and the lower electrode 7 so that they are maintained at a specific interval. Infrared rays that have been applied are absorbed by a radiation absorption part 1 on the upper electrode 2 for converting to heat. The heat warps the bimetal structure part AO, changes the synthetic capacitance between the upper electrode 2 and the lower electrodes 7 and 11, and a detected voltage is changed.
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