| 摘要 |
PROBLEM TO BE SOLVED: To continue laser beam irradiation and gas spouting for a long time without changing the feeding direction of a target material by focusing a pulse laser beam in a decompression vessel and providing a mechanism rotating the feed part for feeding the target material radiating X-rays from generated plasma into the vessel about an axis in the feeding direction. SOLUTION: A laser beam 101 is focused right above a target material feed part such as a stainless steel gas jet nozzle 103 and prescribed-length and parallel X-rays out of X-rays emitted from generated filament-shaped plasma 104 are lad to an X-ray optical system after cutting off a visible light. A stage 105 formed of a rotary stage for rotating the nozzle 103 about a gas spouting axis, a triaxial traveling stage for deciding and controlling a position, and two goniostages for controlling the inclination is installed under the nozzle 103. The feeding direction and position of the target material are thus stabilized and the tip of the nozzle 103 is uniformly or symmetrically cut off for such cases that high-speed atoms, ions, or electrons from plasma 104 are collided thereto. |
