摘要 |
PROBLEM TO BE SOLVED: To permit operation from a remote place by connecting a electron microscope body through a communication line to an operating device disposed in a position physically away from the electron microscope body and provided with a console of the same constitution as a console body of the body electron microscope, and transmitting operation signals from the operating device through the communication line. SOLUTION: A remote operating device is provided with a remote console 27 with the arrangement of the same control knob, mode switch, and the like as a body console. In the case of moving a sample of a body by remote operation, generated signals of a rotary encoder 3-1 direct-coupled to a sample feeding switch of the remote console 27 are converted into voltage by an F-V converter 26-1, digitized by an analog-to-digital converter 26-2 and transmitted by a control computer 26-3 from a personal computer 22 to a device body through a communication line. On the body side, the generated signals are received by a personal computer 14, converted into voltage by a control computer 12-1 and a digital-to- analog converter 12-2 and converted into pulses by a V-F converter 12-3 to move the sample by a stage driver 68.
|