| 摘要 |
PROBLEM TO BE SOLVED: To provide a long-life microwave ion source for oxygen-ion beam. SOLUTION: A plasma chamber is provided for generating plasma of gaseous oxygen and oxygen-ion beams are drawn out from plasma generated in the plasma chamber 110 by draw-out electrodes 130, 132, 134. Molybdenum is used as base materials 130A, 132A, 134A for the draw-out electrodes, and nickel or iridium is used as materials for surface thin films 130B, 132B, 134B thereof, Molybdenum is used as base materials 142A. 144A for support bases 142, 144, and nickel or iridium is used as materials for surface thin films 142B, 144B thereof.
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