| 摘要 |
PROBLEM TO BE SOLVED: To increase the response speed of feedback control in a Z-direction and to prevent the variation of the irradiation position of laser beam accompanying the scanning in an XY direction. SOLUTION: The probe 3 arranged in opposed relation to a sample S, a Z-direction scanner (5) driven in a Z-direction, an XY-direction scanner 4 performing scanning in an XY direction and a measuring head 2 for detecting the displacement of the probe are provided and the probe 3 is attached to the Z-direction scanner (5) and a laser beam emitting part 21 equipped with the measuring head 2 is arranged between the Z-direction scanner (5) and the XY- direction scanner 4. By driving only the probe 3 in the Z-direction, the response speed of the feedback control in the Z-direction is increased and, by making the irradiation position of laser beam on the probe 3 regardless of the scanning in the XY-direction, erroneous-detection is prevented.
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