| 摘要 |
PROBLEM TO BE SOLVED: To evaluate the main spindle sensitivity and the noise sensitivity of a detecting element by measuring the output of each detecting element when an acceleration sensor element is fixed to a vibration tensting machine, and vibrated in the axial direction to be measured, and when each detecting element is fixed on a position rotated by 180 degrees, and vibrated. SOLUTION: An acceleration sensor element is fixed to a vibration generating machine having an excitation shaft, and vibrated in the axial direction to be measured among the X, Y, Z three axes, and the output of a detecting element of each axis is measured. Then the acceleration sensor element is fixed to the vibration testing machine on a position rotated by 180 degrees on a center of the excitation shaft, and vibrated in the axial direction to be measured, and the output of the detecting element for each axis is measured. The acceleration sensor element consists of a weight, a support mounted near the weight and having a hollow part, the detecting elements respectively for X, Y, Z axes, capable of converting the mechanical force into an electric signal, and a flexible board balancing the weight on the center of the hollow part of the support and bringing the same. The influence of the noise vibration from the vibration generating machine can be excluded by carrying out the calculation based on two measured values. |
