| 摘要 |
PROBLEM TO BE SOLVED: To improve the detection sensitivity by reducing the difference of a driving resonance frequency and a detection resonance frequency by the action of different coefficients of thermal expansion of a supporting substrate and an element substrate. SOLUTION: Supporting fixed parts 2a and 2b of a material of a different coefficient of thermal expansion from a supporting substrate 1 are formed on the supporting substrate 1. A first vibrator 3 supported oscillably in the X-axis direction via first support beams 4 and 5 and a second vibrator 6 supported oscillably in a Y-axis direction to the first vibrator 3 via second support beams 7 and 8 are set to the supporting fixed parts 2a and 2b. The first support beam 4, 5 is set extending in a direction orthogonal to a vibration direction of the first vibrator 3, having both ends coupled to end parts of the first vibrator 3 and having a middle part coupled to the support fixed part 2a, 2b. |
