| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam processing device suppressing neutralizing performances to be deteriorated due to the adhesion of insulative polymerized substances to the surface of a strip electrode 8/or to insulating the strip electrode surface by oxidation and stably operating for a long time. SOLUTION: In this device, a means for heating a strip electrode 8 is provided. A material of the surface of the strip electrode 8 is not to react with the gas to be used, or the vapor pressure value of a reaction product at the strip electrode surface temperature is higher than the pressure of a processing chamber end if reacted, or the reaction product has conductivity. The device and suppress neutralizing performances from being deteriorated due to the adhesion of insulative polymerized substances to the strip electrode surface or insulating the strip electrode surface by oxidation so that it can stably operate for a long time.
|
