| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater capable of heating from room temperature to a high temperature of 1000 deg.C or higher, preventing stress concentration within the heater even when severe heat cycles are applied, and enhancing durability, and provide the manufacturing method thereof. SOLUTION: This silicon nitride ceramic heater is formed by burying a resistance heating element 2 and a lead wire 3 within a rod insulating base 1 made of silicon nitride base ceramic and installing a connecting terminal part 4 electrically connected to the lead wire 3 in the outer peripheral part of the insulating base 1, and wherein the rod insulating base 1 is constituted with a core part 1a and a shell part 1b formed in the surrounding of the core part 1a, the resistance heating element 2 and the lead wire 3 are formed with a conductor material having practically the same composition in a concentric circle region from the center of the rod insulating base 1 and in almost the symmetrical position, and the shell part 1b is made seamless.
|
