| 摘要 |
<p>PROBLEM TO BE SOLVED: To miniaturize a base end in an ultrasonic transducer provided in a bonding device. SOLUTION: A first hollow portion 100 communicating with a rear end aperture is formed at a base end portion of a horn body 12, and an internal unit 14 is disposed therein. The internal unit 14 is constituted by a vibrator 16 and a pressing block for pressing and fixing the vibrator. A through-hole is formed in the central portion of the internal unit 14. A second hollow portion 102 and a third hollow portion 104 are formed in the horn body 12. A signal line can be led from the inside of the vibrator 16. As a result, the outer shape of the base end portion can be simplified and miniaturized. Since the vibrator 16 is housed inside, the vibrator 16 can be protected from thermal influences.</p> |
