| 摘要 |
PROBLEM TO BE SOLVED: To reduce number of the components of a tracked automatic transfer apparatus and to make easier the exchanging work of a treated-object transfer section. SOLUTION: An automatic transfer is constituted of automatic carriers, which are electrically driven with the electric power supplied from the outside and carry semiconductor wafers, a track section 5 which is laid on the running guide surface of the grating floor 4 of the carriers and provided with a rail function which decides the running routes of the carriers, and guide rollers 6 which are installed to the carriers and brought into contact with the track section 5 to guide the carriers along the track section 5. The transfer apparatus is also constituted of a power forming section 7a incorporated in the track section 5 and a feeding section 7 which feeds electric power formed by the power forming section 7a to the carriers. The number of the components of the transfer apparatus is reduced by integrating the feeding section 7, track section 5, and guide rollers 6 into one structure, by incorporating the power forming section 7a of the feeding section 7 in the hollow section of the track section 5 laid on the grating floor 4. |
