发明名称 DEIVCE FOR MEASUING POTENTIAL
摘要 PROBLEM TO BE SOLVED: To provide a small-sized and inexpensive potential measuring device capable of measuring a potential of a measured object with a high-frequency wave without destructing the measured object and an electro-optic element. SOLUTION: At least two electrodes 2, 3 are formed on a surface of an electro-optic element 1 of which an optical property varies with an electric field, and the elctrodes 2, 3 are connected electrically to electrodes 6, 7 of a measured wiring board 5. Optical property change of light from a laser diode pulse light source 12 caused by the electro-optic element 1 is converted into light intensity change to be detected by a photo-detecting part 20, and an inexpensive potential measuring device capable of coping with a high speed signal is provided thereby, which is free from destruction of the measured object and the electro-optic element 1.
申请公布号 JP2000338198(A) 申请公布日期 2000.12.08
申请号 JP19990151077 申请日期 1999.05.31
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 OGURA TETSUYOSHI;IWAKI HIDEKI;TAGUCHI YUTAKA;BESSHO YOSHIHIRO
分类号 G01R31/302;G01R1/06;G01R19/00;H01L21/66;(IPC1-7):G01R31/302 主分类号 G01R31/302
代理机构 代理人
主权项
地址