FIELD EMISSION TYPE COLD CATHODE, ITS MANUFACTURE, AND MANUFACTURE OF FLAT DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a field emission type cold cathode and a flat display both of which can improve the controllability of emitter formation and can generate a uniform and stable high emission current and to provide their manufacturing methods. SOLUTION: An emitter 3 formed of at least carbon nano-tubes shorter than the film thickness of an insulation layer 4 on a glass substrate 1 on which a conductive layer 2 is formed, the insulation layer 4 and a gate electrode 5 are laminated on its upper layer, and a gate opening part is formed by partially etching the gate electrode 5 and the insulation layer 4. Specifically, the length of the carbon nano-tube is so controlled as to be set shorter than d-Vg/ Eb, where Eb is the withstand voltage of the insulation layer 4, (d) is the film thickness thereof, and Vg is an application voltage.