JOINING METHOD AND PRODUCTION OF OPTICAL INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide a joining method which is capable of joining a compound semiconductor crystal and a magneto-optical crystal with sufficiently high strength by a direct joining method. SOLUTION: This joining method is the joining method for joining the compound semiconductor crystal and the magneto-optical crystal and includes a stage for modifying the first surface of the compd. semiconductor crystal with a hydroxyl group, a stage for activating the second surface of the magneto- optical crystal with the hydroxyl group, a stage for modifying the activated second surface of the magneto-optical crystal with the hydroxyl group and a stage for bringing the first surface modified by the hydroxyl group and the second surface modified by the hydroxyl group into contact with each other and heating these surfaces in this state.