X-RAY GENERATOR, X-RAY EXPOSURE DEVICE HAVING IT, AND X-RAY GENERATING METHOD

摘要

PROBLEM TO BE SOLVED: To stably generate X-rays. SOLUTION: An X-ray generator generates X-rays by focusing laser beams 101 on a target within a vacuum chamber, and generating plasma from the target, and a detecting part for detecting the position of a target material carrying part for carrying a material for constituting the target in the vacuum chamber or the change of the position is installed.