| 摘要 |
PROBLEM TO BE SOLVED: To improve the working efficiency of a pattern inspection, by sensing the defects included in the patterns of samples based on the comparing result of the numbers of first and second patterns with each other which are respectively included in first and second picture data. SOLUTION: After a picture memory 7 generates picture data from the electric signals fed from a light receiving element 6, it outputs the picture data to a pattern reducing portion 91 and a portion 92 for calculating the number of the patterns. The portion 92 calculates the number of the patterns of the picture data fed from the picture memory 7, and the number of the patterns of the picture data fed from the pattern reducing portion 91 to store both the numbers in a memory 94 for storing the number of patterns. Then, a computer 11 compares the number of the patterns of the picture data before the reduction with the number of the patterns of the picture data after the reduction which are stored together in the memory 94, and when both the numbers do not coincide with each other resultantly, it is sensed by a defect sensing portion 93 that defects are included in the scope of pattern inspections being executed presently.
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