发明名称 SCANNING TYPE PROXIMITY FIELD MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a scanning type proximity field microscope measuring a specimen at a high S/N ratio and a high resolution. SOLUTION: This device is provided with a polarizing mean 10 making light from a light source 8 to be a prescribed polarized state, an incident means 9 to make the light incident on the surface of a specimen 3 after passing through the polarizing mean 10, a probe 1 with its tip part 2 positioned in proximity to the surface of the specimen 3 to which the light is made incident, a converging means 11 converging scattered light at the tip part 2 of the probe 1, and a difference means detecting the difference in amplitude between two polarized components of the light with polarized directions different from each other converged by the converting means 11. The difference means is provided with a phase difference means 18 providing a phase difference between a P polarized light component and an S polarized light component of the scattered light at the tip part 2 of the probe 1, and an interference means 19 making the polarized light components provided with the phase differences interfere with each other.
申请公布号 JP2000338118(A) 申请公布日期 2000.12.08
申请号 JP19990146518 申请日期 1999.05.26
申请人 OLYMPUS OPTICAL CO LTD 发明人 ONADA TAKESHI
分类号 G01B11/30;G01N37/00;G01Q60/18;(IPC1-7):G01N37/00 主分类号 G01B11/30
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