| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a method of manufacturing a thin-film solar cell module with high efficiency by reducing an unnecessary current pass at the exposed surface of a semiconductor, which is removed at the same time of scribing a second electrode layer. SOLUTION: This method consists following steps: a step of removing the part of a first electrode layer formed on a substrate 1 and dividing the first electrode layer corresponding to a plurality of unit elements, a step of forming a semiconductor layer 4 on the first electrode layer 1, a step of removing a part of the semiconductor layer and providing connecting openings to the first electrode layer on the semiconductor layer corresponding to the plurality of unit elements, a step of forming a second electrode layer 6 on the semiconductor layer, a step of removing a part of the second electrode layer and the semiconductor layer in the vicinity of the connection openings and dividing the second electrode layer and the semiconductor layer corresponding to the plurality of the unit elements, a step of exposing the ends of the semiconductor layer by removing residues on the second electrode layer and the semiconductor layer, and a step of heat-treating at 130 deg.C or higher.</p> |
