| 摘要 |
PROBLEM TO BE SOLVED: To execute the inspection without damaging a part to be measured and to reduce the cost of a product by enabling an inspection probe for contact inspecting a substrate to be contacted with and separated from the part to be measured, and mounting a contact impact reducing means. SOLUTION: This substrate inspecting device 1 executes the continuity test of a wiring pattern of a circuit board 2 provided with the predetermined wiring pattern, and an inspection probe 3 is contacted with a part to be measured of the circuit board 2 to inspect the substrate. In the inspection, the inspection probe 3 comes into contacted with and separates from the part to be measured by a servo motor 4, and the impact in the contact is reduced by an impact reducing means 5. The impact reducing means 5 consists of compression coil springs 10, 11, 12, a shaft member 13, a stopper member 14 and the like, and the inspection probe 3 mounted on a block 8 is temporarily stopped, and then brought into contact with the part to be measured of the circuit board 2 by the functions of these members. Whereby the impact can be remarkably reduced, and the part to be measured can be prevented from being damaged.
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