| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of gas from a graphite substrate formed with an X-ray generating layer, during the use of a rotating anode X-ray tube by filling pores of the graphite substrate with ceramics or a high fusing point metal. SOLUTION: Ceramic filled in pores is preferably SiC. A graphite substrate 1 is sintered into shape with a shade type inclined part 2. The burned graphite substrate 1 is of porous structure with fine pores 3, and gas exists in the pores 3. The burned graphite substrate 1 is set in a chamber of a CVI device and evacuated, and material gas of SiC is fed into the chamber from a feed pipe. Evacuation and gas feeding are repeated to substitute SiC for gas existing in the pores 3 to fill the pores 3 with SiC. The material gas of SiC is preferably formed of SiH4/CH4/H2 or the like. A high fusing point metal such as tungsten may be filled. This results in obtaining a rotating anode X-ray tube generating X-rays of high output without generating gas.
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