发明名称 METHOD AND DEVICE FOR CONTROLLING TEMPERATURE OF HEATING MEANS AND HEAT PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide temperature controlling method capable of accurately controlling the temperature of heating means. SOLUTION: The temperature controlling method for heating means 24A to 24E consisting of a material whose resistance ratio is changed in accordance with temperature changes is constituted of a process for measuring the resistance values of these heating means 24A to 24E, a process for finding out the resistance ratios of the heating means 24A to 24E from the resistance values, a process for finding out the temperatures of the heating means 24A to 24E on the basis of respective resistance ratios, and a process for controlling power to be supplied to the heating means 24A to 24E on the basis of the obtained temperatures. Consequently the temperatures of the heating means 24A to 24E can be accurately controlled.
申请公布号 JP2000339039(A) 申请公布日期 2000.12.08
申请号 JP19990145681 申请日期 1999.05.25
申请人 TOKYO ELECTRON LTD 发明人 OSAWA SATORU
分类号 H01L21/22;G05D23/24;(IPC1-7):G05D23/24 主分类号 H01L21/22
代理机构 代理人
主权项
地址